Gas and liquid contact apparatus – Fluid distribution – Valved
Reexamination Certificate
2008-07-24
2009-12-29
Bushey, Scott (Department: 1797)
Gas and liquid contact apparatus
Fluid distribution
Valved
C261S046000, C261S047000, C261S048000, C261S052000, C261S072100
Reexamination Certificate
active
07637482
ABSTRACT:
In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.
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Kawamoto Tatsushi
Kawao Mitsushi
Matsuno Shigeru
Miyashita Shoji
Uchikawa Fusaoki
Bushey Scott
Mitsubishi Denki & Kabushiki Kaisha
Shimadzu Corporation
Westerman Hattori Daniels & Adrian LLP
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