Liquid spray head and its production method

Details Liquid spray head and its production method Liquid spray head and its production method

1993-12-15

1996-06-25

Fuller, Benjamin R.

Incremental printing of symbolic information

Ink jet

Ejector mechanism

B41J 2045

Patent

active

055304656

ABSTRACT:
The present invention relates to a liquid spray head provided with a plurality of liquid spray elements arranged in an array on a substrate. Each element comprises a chamber arranged on the substrate for holding a liquid to be sprayed, a nozzle, a liquid path for communication with the nozzle and the chamber, a diaphragm arranged on the liquid chamber, a piezoelectric element comprising a lower electrode arranged on the diaphragm, a piezoelectric film comprising a lead zirconate titanate film arranged on the lower electrode and an upper electrode arranged on the piezoelectric film. Energy is applied to the piezoelectric element so as to bend the diaphragm for deforming a volume of the liquid chambers to spray the liquid. The liquid chambers have a pitch equal to the pitch of the nozzles, and the following relationships are satisfied:

REFERENCES:
patent: 4312008 (1982-01-01), Taub et al.
patent: 4520374 (1985-05-01), Koto
patent: 4525728 (1985-06-01), Koto
patent: 4546362 (1985-10-01), Koto
patent: 4947184 (1990-08-01), Moynihan
patent: 5116457 (1992-05-01), Jerman
Japanese Journal of Applied Physics, vol. 30, No. 12B, Dec., 1991, pp. 3562-3566, Single-Target Sputtring Process for Lead Zirconate Titanate Thin Films with Precise Composition Control, by Kazuyoshi Torii et al.

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