Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-12-01
2010-11-02
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000, C355S077000
Reexamination Certificate
active
07826031
ABSTRACT:
An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a gap between the projection optical system and the substrate. The exposure apparatus has a liquid recovery mechanism with a drive section powered by electric power supplied from a commercial power source and an uninterruptible power source separate from the commercial power source. When the commercial power source has a failure, the supply of electric power to the drive section is switched to the uninterruptible power source.
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Arai Dai
Hara Hideaki
Takaiwa Hiroaki
Mathews Alan A
Nikon Corporation
Oliff & Berridg,e PLC
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