Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-07-01
2010-12-07
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S077000
Reexamination Certificate
active
07847916
ABSTRACT:
An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a gap between the projection optical system and the substrate. The exposure apparatus has a liquid recovery mechanism with a drive section powered by electric power supplied from a commercial power source and an uninterruptible power source separate from the commercial power source. When the commercial power source has a failure, the supply of electric power to the drive section is switched to the uninterruptible power source.
REFERENCES:
patent: 5528118 (1996-06-01), Lee
patent: 5610683 (1997-03-01), Takahashi
patent: 5623853 (1997-04-01), Novak et al.
patent: 5762747 (1998-06-01), Park et al.
patent: 5874820 (1999-02-01), Lee
patent: 6304005 (2001-10-01), Aoki et al.
patent: 7411653 (2008-08-01), Hoogendam et al.
patent: 2002/0129838 (2002-09-01), Myland
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2005/0048220 (2005-03-01), Mertens et al.
patent: 2005/0263068 (2005-12-01), Hoogendam et al.
patent: 2006/0023183 (2006-02-01), Novak et al.
patent: 2006/0132737 (2006-06-01), Magome et al.
patent: 2008/0278696 (2008-11-01), Hoogendam et al.
patent: 0 945 960 (1999-09-01), None
patent: A-1-278240 (1989-11-01), None
patent: A 2-97239 (1990-04-01), None
patent: A-2-97239 (1990-04-01), None
patent: A-5-199680 (1993-08-01), None
patent: A 5-199680 (1993-08-01), None
patent: A-6-124873 (1994-05-01), None
patent: A-8-166475 (1996-06-01), None
patent: A-8-330224 (1996-12-01), None
patent: A-9-115794 (1997-05-01), None
patent: A 9-115794 (1997-05-01), None
patent: A-10-163099 (1998-06-01), None
patent: A-10-214783 (1998-08-01), None
patent: A-10-303114 (1998-11-01), None
patent: A 10-303114 (1998-11-01), None
patent: A 10-340846 (1998-12-01), None
patent: A-10-340846 (1998-12-01), None
patent: A-2000-505958 (2000-05-01), None
patent: A-2002-15978 (2002-01-01), None
patent: WO 98/28665 (1998-07-01), None
patent: WO 99/49504 (1999-09-01), None
Dec. 7, 2004 International Search Report from PCT/JP04/012787.
May 22, 2006 International Preliminary Report on Patentability from PCT/JP04/012787.
Mar. 26, 2007 Search Report and Written Opinion from Singapore Application No. 200504908-5.
Mar. 10, 2010 Notice of Allowance in U.S. Appl. No. 11/606,935.
Nov. 24, 2009 Office Action in Japanese Application No. 2005-513548.
Mar. 16, 2010 Notice of Allowance in Japanese Application No. 2005-513548.
Jan. 4, 2008 Supplementary European Search Report in European Application No. 04772736.7.
May 5, 2008 Australian Examination Report in Singapore Application No. 200504908-5.
Jun. 24, 2010 Notice of Allowance in U.S. Appl. No. 11/606,935.
Arai Dai
Hara Hideaki
Takaiwa Hiroaki
Mathews Alan A
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
Liquid recovery apparatus, exposure apparatus, exposure... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Liquid recovery apparatus, exposure apparatus, exposure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Liquid recovery apparatus, exposure apparatus, exposure... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4175322