Liquid quantity determination unit, photolithography...

Fluent material handling – with receiver or receiver coacting mea – Processes – Filling dispensers

Reexamination Certificate

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Details

C141S083000, C355S067000, C355S077000, C359S031000, C359S665000, C359S733000, C356S073100, C356S124000, C356S239200

Reexamination Certificate

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07073542

ABSTRACT:
The invention automates determination of the quantity of a index matching liquid.The invention is a liquid quantity determination unit to determine the quantity of a filling liquid to be filled between a plurality of optical components, and includes an inspection beam emitting unit to emit an inspection beam substantially vertically to an opposed surface of one of a pair of the optical components facing each other with the filling liquid interposed therebetween, a transporting unit to transport the inspection beam emitting unit to emit the inspection beam to a desired inspection point on the opposed surface, a reflecting point identifying unit to identifying the reflecting point of the inspection beam based on a reflected beam of the inspection beam emitted from the inspection beam emitting unit toward the opposed surface, and a determination unit to determine the presence or absence of the filling liquid at the inspection point based on the reflecting point determined by the reflecting point identifying unit.

REFERENCES:
patent: 4764969 (1988-08-01), Ohtombe et al.
patent: 5257128 (1993-10-01), Diller et al.
Clube, Francis et al., “Large-field, high-resolution photolithography”,SPIE, vol. 3099, pp. 36-45.

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