Liquid processing system

Details Liquid processing system Liquid processing system

2007-07-24

2010-12-14

Cleveland, Michael (Department: 1712)

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

Reexamination Certificate

active

07849864

ABSTRACT:
A liquid processing system includes a liquid processing section including liquid processing units horizontally disposed therein and each configured to perform a liquid process while supplying a process liquid onto a substrate; a process liquid storing section that stores the process liquid to be supplied to the liquid processing units of the liquid processing section; and a piping unit including a supply pipe configured to guide the process liquid from the process liquid storing section to the liquid processing units. The process liquid storing section, the piping unit, and the liquid processing section are disposed inside a common casing in this order from below. The supply pipe of the piping unit has a horizontal pipe portion horizontally extending along an array direction of the liquid processing units, such that the process liquid is supplied from the horizontal pipe portion to the liquid processing units individually.

REFERENCES:
patent: 5937223 (1999-08-01), Akimoto et al.
patent: 2003/0066797 (2003-04-01), Sasaki
patent: 2004/0179173 (2004-09-01), Nakamura et al.
patent: 2006/0201363 (2006-09-01), Nakatsukasa et al.
patent: 2005-093769 (2005-04-01), None
patent: WO2005015625 (2005-02-01), None

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