Liquid processing apparatus with nozzle having planar...

Details Liquid processing apparatus with nozzle having planar... Liquid processing apparatus with nozzle having planar...

2008-01-01

2008-01-01

Perrin, Joseph L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S198000, C134S200000, C156S345210, C156S345550

Reexamination Certificate

active

07314054

ABSTRACT:
A liquid processing apparatus includes containers26, 27, 26a,26bsurrounding processing chambers51, 52for accommodating a plurality of wafers W and nozzles54, 56for supplying a processing liquid to the substrates W in order to perform a liquid process. The nozzles54, 56are respectively equipped with a plurality of ejecting orifices53, 55capable of ejecting the processing liquid in a plane manner, allowing the substrates W to be processed uniformly and effectively.

REFERENCES:
patent: 4027686 (1977-06-01), Shortes et al.
patent: 5022419 (1991-06-01), Thompson et al.
patent: 5154199 (1992-10-01), Thompson et al.
patent: 5221360 (1993-06-01), Thompson et al.
patent: 5224503 (1993-07-01), Thompson et al.
patent: 5378308 (1995-01-01), Thoms
patent: 5379784 (1995-01-01), Nishi et al.
patent: 6039057 (2000-03-01), Doran
patent: 6274506 (2001-08-01), Christenson et al.
patent: 6284043 (2001-09-01), Takekuma
patent: 6527861 (2003-03-01), Takekuma
patent: 03-022533 (1991-01-01), None
patent: 06-089889 (1994-03-01), None
patent: 06-163500 (1994-06-01), None
patent: 07-211683 (1995-08-01), None
patent: 09-027470 (1997-01-01), None
patent: 10-247635 (1998-09-01), None
patent: 11-233461 (1999-08-01), None
patent: 11-260789 (1999-09-01), None
patent: 1999-013579 (1999-02-01), None
Korean Office Action, issued Apr. 26, 2006.

Affiliated with

Also associated with

Rating

Liquid processing apparatus with nozzle having planar... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Liquid processing apparatus with nozzle having planar..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Liquid processing apparatus with nozzle having planar... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2790169