Liquid processing apparatus, liquid processing method and...

Details Liquid processing apparatus, liquid processing method and... Liquid processing apparatus, liquid processing method and...

2011-02-18

2011-10-18

Smith, Duane (Department: 1776)

Gas separation: processes

With control responsive to sensed condition

Temperature sensed

C055S385200, C095S273000, C096S417000, C096S420000, C454S187000, C700S273000

Reexamination Certificate

active

08038769

ABSTRACT:
A liquid processing apparatus, includes an apparatus main body, a power room having an atmosphere separated from the clean room by a partition member, an air suction path configured to suction an air in the clean room and take the air into the power room, a temperature control part provided in the power room and configured to control at least a temperature of the air taken in via the air suction path, an air supplying path configured to supply the air from the temperature control part to the liquid processing unit, a ventilation part configured to take the air from the air suction path and supply the air via the air supplying path, and a cleaning filer configured to clean the air taken in from the air suction path.

REFERENCES:
patent: 6306455 (2001-10-01), Takamori et al.
patent: 6368776 (2002-04-01), Harada et al.
patent: 6960236 (2005-11-01), Tamura et al.
patent: 7914613 (2011-03-01), Matsuoka
patent: 2000-150335 (2000-05-01), None
patent: 2000-182949 (2000-06-01), None

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