Liquid processing apparatus and liquid processing method

Details Liquid processing apparatus and liquid processing method Liquid processing apparatus and liquid processing method

2008-04-08

2008-04-08

Barr, Michael (Department: 1792)

Cleaning and liquid contact with solids

Processes

Including use of vacuum, suction, or inert atmosphere

C134S022110, C134S022120, C134S026000, C134S036000

Reexamination Certificate

active

11892429

ABSTRACT:
A cleaning processing apparatus comprises a spin chuck for holding a wafer W, an under plate being positioned to face the back surface of the wafer W with a prescribed gap provided therebetween, a support member for supporting the under plate, and a nozzle hole formed to extended through the plate member and the support member. A chemical liquid, a pure water and a gas can be supplied into a nozzle hole through opening-closing valves, and the chemical liquid and the pure water remaining inside the nozzle hole can be sucked by a sucking device. A pure water remaining inside the nozzle hole is sucked and removed by using the sucking device after the processing of the wafer W with a pure water and, then, a gas is spurted onto the back surface of the wafer W.

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