Liquid precursors for formation of metal oxides

Details Liquid precursors for formation of metal oxides Liquid precursors for formation of metal oxides

1998-04-17

1999-11-09

Bowers, Charles

Coating processes

Heat decomposition of applied coating or base material

556 40, 427453, 427123, 4271263, 427421, 106 125, 438782, 438785, 438778, 438 3, 438240, H01L 2100, H01L 21469, B05D 302, B05D 512

Patent

active

059809833

ABSTRACT:
A liquid precursor is provided for the formation of metal oxide films comprising a mixture of two ro more types of beta-diketonate ligands bound to one or more metals. For example, a liquid mixture was formed of the mixed aluminum beta-diketonates derived from two or more of the ligands 2,6-dimethyl-3,5-heptanedione; 2,7-dimethyl-3,5-heptanedione; 2,6-dimethyl-3,5-octanedione; 2,2,6-trimethyl-3,5-heptanedione; 2,8-dimethyl-4,6-nonanedione; 2,7-dimethyl-4,6-nonanedione; 2,2,7-trimethyl-3,5-octanedione; and 2,2,6-trimethyl-3,5-octanedione. Films of metal oxides are deposited from vaporized precursor mixtures of metal beta-diketonates and, optionally, oxygen or other sources of oxygen. This process may be used to deposit high-purity, transparent metal oxide films on a substrate. The liquid mixtures may also be used for spray coating, spin coating and sol-gel deposition of materials.

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