Heating – Having condition responsive control – Of or by pressure of fluid work or work chamber atmosphere
Patent
1998-03-12
1999-12-28
Hoang, Tu Ba
Heating
Having condition responsive control
Of or by pressure of fluid work or work chamber atmosphere
4272481, C23C 1600
Patent
active
060073306
ABSTRACT:
A system for delivering a liquid phase precursor fluid into a process chamber as a vapor phase fluid at constant pressure, the system comprising: a vaporizer for vaporizing the liquid phase precursor fluid prior to injecting the vapor phase fluid precursor into the process chamber, and a controllable device for transporting a preselected volume of the liquid phase fluid precursor from a reservoir to the vaporizer responsive to the pressure at the outlet of the vaporizer prior to entering the process chamber where the transport device is operated as the pressure at the outlet of the vaporizer canister drops, whereby system pressure perturbances are minimized prior to entering the process chamber.
REFERENCES:
patent: 4726764 (1988-02-01), Yoshikai
patent: 5098741 (1992-03-01), Nolet et al.
patent: 5451260 (1995-09-01), Versteeg et al.
patent: 5492724 (1996-02-01), Klinedinst et al.
patent: 5645642 (1997-07-01), Nishizato et al.
patent: 5866795 (1999-02-01), Wang et al.
Cosmos Factory, Inc.
Hoang Tu Ba
Newhouse, Esq. David E.
Shahani, Esq. Ray K.
Wilson Gregory A.
LandOfFree
Liquid precursor delivery system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Liquid precursor delivery system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Liquid precursor delivery system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2378170