Liquid-phase growth apparatus and method

Details Liquid-phase growth apparatus and method Liquid-phase growth apparatus and method

2006-03-21

2006-03-21

Kunemund, Robert (Department: 1722)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

C117S206000, C117S054000, C117S057000, C117S061000, C118S400000, C118S402000, C118S407000, C118S428000

Reexamination Certificate

active

07014711

ABSTRACT:
A liquid-phase growth apparatus for growing a crystal on a substrate includes a crucible containing a solution that contains a raw material for forming the crystal, and a substrate holder for vertically holding the substrate. The substrate holder includes connectors, a receiving component, and a push component. The receiving component and the push component are opposite to each other and are connected by the connectors. The push component holds an upper portion of the substrate while the receiving component holds a lower portion of the substrate. The substrate holder containing the vertically held substrate is dipped into the solution. The receiving component ascends with buoyancy in the solution contained in the crucible, so that the substrate is now held securely and prevented from cracking due to thermal expansion.

REFERENCES:
patent: 3752118 (1973-08-01), Solomon et al.
patent: 4354453 (1982-10-01), Koike et al.
patent: 6231667 (2001-05-01), Iwane et al.
patent: 6391108 (2002-05-01), Nishida et al.
patent: 2002/0112660 (2002-08-01), Nishida et al.

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