Coating apparatus – Immersion or work-confined pool type – Work-confined pool
Patent
1986-03-31
1987-10-06
McIntosh, John P.
Coating apparatus
Immersion or work-confined pool type
Work-confined pool
118415, 118421, B05C 309, H01L 738
Patent
active
046975438
ABSTRACT:
A slider/stator device for the growth of thin film material, such as mercury cadmium telluride, in which the substrate, thin film and growth solution are kept free from impurities by use of sleeves, made, for example, from sapphire, in order to prevent contamination and adhesion of the growth solution to the slider assembly.
REFERENCES:
patent: 3747562 (1973-07-01), Stone
patent: 4033291 (1977-07-01), Naito et al.
patent: 4317689 (1982-03-01), Bowers et al.
Journal of Crystal Growth, "Use of Sapphire Liners to Eliminate Edge Growth in LPE (Al,Ga)As," Tamargo et al, Feb. 1981, pp. 325-329.
Abbott Richard C.
Vydyanath Honnavalli R.
Honeywell Inc.
Leone, Sr. George A.
McIntosh John P.
Solakian John S.
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