Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1978-04-11
1980-07-22
Rutledge, L. Dewayne
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
29569L, 29580, 148172, 148175, 156648, 156649, 156652, 156655, 156662, 331 945C, 331 945H, 357 16, 357 18, 357 55, 357 56, H01L 21208, H01L 21302
Patent
active
042138051
ABSTRACT:
A semiconductor device of a filamentary laser is fabricated by a method including the steps of forming a first GaAlAs layer on a GaAs body, forming a laser active layer of GaAs on the first GaAlAs layer, etching the first GaAlAs layer and the laser active layer so as to have a mesa shaped structure and to expose the GaAs body, and forming a second GaAlAs layer on said exposed GaAs body and on the surface of said mesa shaped structure so that the mesa etched first GaAlAs layer and the mesa etched active layer are surrounded by the second GaAlAs layer.
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Hayashi et al., "GaAs-AlGaAs . . . Lasers", J. Applied Physics, vol. 42, No. 5, Apr. 1971, pp. 1929-1941.
Tsukada et al., "Very-Low-Current . . . MESA . . . Lasers" , Applied Physics Letters, vol. 20, No. 9, May 1, 1972, pp. 344-345.
Tracy et al., "Three-Dimensional Light Guides . . . AlGaAs."
Ibid., vol. 22, No. 10, May 15, 1973, 511-512.
Nakamura et al, "Optically Pumped GaAs . . . Corrugation . . . ".
Ibid., vol. 22, No. 10, May 15, 1973, pp. 515-516.
Burnham et al., "AlGaAsP,-GaAsP Heterostructure Laser . . . ", Applied Physics Letters, vol. 17, No. 10, Nov. 15, 1970, pp. 455-457.
Hitachi , Ltd.
Rutledge L. Dewayne
Saba W. G.
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