Liquid phase epitaxial film growth apparatus

Details Liquid phase epitaxial film growth apparatus Liquid phase epitaxial film growth apparatus

1992-04-10

1993-11-23

Wilczewski, Mary

Chemical apparatus and process disinfecting, deodorizing, preser

Physical type apparatus

Crystallizer

118415, 118421, C30B 1906

Patent

active

052641902

ABSTRACT:
An apparatus for liquid phase epitaxial film growth includes a mother boat for supporting a substrate, a melt boat slidable on the mother boat for containing a melt and selectively bringing the substrate and the melt into contact, and a lid for opening and closing the melt boat. The mother boat is disposed in a quartz tube and push rods extend into the tube for sliding the lid to open and close the melt boat.

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