Liquid-particle analysis of metal materials

Details Liquid-particle analysis of metal materials Liquid-particle analysis of metal materials

2006-01-13

2011-10-04

Menon, Krishnan S (Department: 1777)

Chemistry: analytical and immunological testing

Metal or metal containing

C436S075000, C356S336000, C356S337000, C356S338000, C356S341000, C250S574000

Reexamination Certificate

active

08030082

ABSTRACT:
The invention includes a method of detecting impurities in a metal-containing article. A portion of metal material is removed from a metal article and is solubilized in an acid or base-comprising liquid to produce a liquid sample. The liquid sample is subjected to an incident laser beam and light scattered from the sample is detected. The invention includes a method of analyzing a physical vapor deposition target material. A portion of target material is removed from the target and is rinsed with an acid-comprising solution. The portion of target material is dissolved to produce a liquid sample. The sample is subjected to an incident laser beam and scatter of the laser beam is detected to determine the number of particles present in the sample within a particular size range.

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English Translation of 3rd Party Observation from Japanese Patent Office.

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