Liquid metal ion source with pulse generator control

Details Liquid metal ion source with pulse generator control Liquid metal ion source with pulse generator control

1986-05-22

1988-03-22

Moore, David K.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511101, 315363, 313163, 3133621, 3133601, 313167, H01J 724, H05B 3126

Patent

active

047331348

ABSTRACT:
A liquid metal ion source is disclosed, wherein it comprises an ion emitter tip, ion source material holder means holding ion source material for supplying liquid metal ion source material to said ion emitter tip, ion extracting means for extracting ions from said ion emitter tip, when a voltage is applied between the ion extracting means and the ion emitter tip, the pulsing means for pulsing the relative voltage applied between the ion extracting means and the ion emitter tip. A DC voltage corresponding to the threshold voltage V.sub.th for ion beam extraction is applied between the ion emitter tip and the extracting electrode, what permits to extract an ion beam having a high current density by superposing a pulsed voltage on the DC voltage.

REFERENCES:
patent: 4344019 (1982-08-01), Gavin et al.
patent: 4422013 (1983-12-01), Turchi et al.
patent: 4453078 (1984-06-01), Shimizu
patent: 4560907 (1985-12-01), Tamura et al.
patent: 4624833 (1986-11-01), Umemura et al.
patent: 4629931 (1986-12-01), Clark, Jr. et al.
patent: 4631448 (1986-12-01), Tamura et al.

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