Liquid metal ion source and apparatus

Alloys or metallic compositions – Copper base – Silicon containing

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3133621, 315425, 3154921, 420497, 420499, H01J 105

Patent

active

046248331

ABSTRACT:
A liquid metal ion source for emitting P ions, wherein a Cu alloy which contains at most 25 at. % of P and if necessary, further contains Ag, C or Si, and/or B is melted and fed to an emitter tip so as to generate an ion beam under a high electric field.

REFERENCES:
patent: 4318029 (1982-03-01), Jergenson
patent: 4318030 (1982-03-01), Jergonson
patent: 4367429 (1983-01-01), Wang et al.
patent: 4453078 (1984-06-01), Shimizu

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