Liquid metal ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source

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Details

31511191, 3133621, 3133611, 250423R, 250424, 250427, H01J 724

Patent

active

046805079

ABSTRACT:
A liquid metal ion source has a reservoir which holds a source material to-be-ionized in a melted state; an emitter which emits from its tip, ions of the melted source material fed from the reservoir; and an extracting electrode which applies a high electric field to the tip of the emitter, thereby to extract the ions from the tip of the emitter. The liquid metal ion source further comprises tank means for storing the source material to be fed to the reservoir, transfer means for transferring the source material from the tank means to the reservoir, and a vacuum chamber for holding the constituents in a vacuum state.

REFERENCES:
patent: 3756434 (1973-09-01), Teske
patent: 4284035 (1981-08-01), White
patent: 4323178 (1982-04-01), Longinotti
patent: 4328667 (1982-05-01), Valentian et al.

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