Liquid-metal ion beam source substructure

Details Liquid-metal ion beam source substructure Liquid-metal ion beam source substructure

1987-10-05

1988-07-05

LaRoche, Eugene R.

Radiant energy

Ion generation

Field ionization type

250425, H01J 2702

Patent

active

047556838

ABSTRACT:
A corrosion-resistant, long-life, high-capacity, power-efficient source substructure for a source of liquid-metal ions useable in focused-ion-beam apparatus. The substructure takes the form of an elongate carbon needle, pointed at one end, structurally supported entirely within the turns of an electrical heating coil having end leads which are conductively connected to, and structurally supported by, a pair of larger cross section electrical feeder legs.

REFERENCES:
patent: 4488045 (1984-12-01), Anazawa et al.

Affiliated with

Also associated with

Rating

Liquid-metal ion beam source substructure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Liquid-metal ion beam source substructure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Liquid-metal ion beam source substructure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2333879