Liquid metal droplet generator

Details Liquid metal droplet generator Liquid metal droplet generator

2005-10-25

2009-12-29

King, Roy (Department: 1793)

Dispensing

Molten metal dispensing

C222S593000, C222S594000, C266S236000, C164S271000

Reexamination Certificate

active

07637403

ABSTRACT:
Small, high velocity liquid metal droplets are produced for applications that require the accurate and remote placement of small quantities of a metal. The magnetic pressure of current flowing through liquid metal is used to force small quantities of liquid metal through an orifice. Examples of applications are to feed metal fuel into plasma extreme ultraviolet sources, and to place solder bumps on an integrated circuit prior to the attachment of connections.

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patent: 7075096 (2006-07-01), McGeoch
Crowell, Benjamin, Simple Nature, Chapter 11-Electromagnetism, 2001, Light and Matter, 645-647.
McGeoch, Malcolm W., “Plasma pinch EUV source with particle injection”, Proc. SPIE, vol. 5751, p. 556 et seq., 2005.

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