Liquid material-vaporizing and supplying apparatus

Details Liquid material-vaporizing and supplying apparatus Liquid material-vaporizing and supplying apparatus

1995-02-13

1997-05-20

Garrett, Felisa C.

Coating apparatus

Gas or vapor deposition

118725, 118726, C23C 1600

Patent

active

056308787

ABSTRACT:
A liquid flow meter is connected in series with a vaporizer having a vaporizing function and a flow rate-adjusting function and vaporizing a liquid material supplied through said liquid flow meter to compare a flow rate detected by the liquid flow meter with a set value, whereby controlling a quantity of liquid material introduced into a vaporizing chamber provided in said vaporizer on the basis of this comparison result, and thus a flow rate of vaporized gas can be always stably controlled in high-speed response.

REFERENCES:
patent: 5203925 (1993-04-01), Shibuya et al.
patent: 5252134 (1993-10-01), Stauffer
patent: 5372754 (1994-12-01), Ono
patent: 5383970 (1995-01-01), Asaba et al.

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