Etching a substrate: processes – Adhesive or autogenous bonding of two or more... – Removing at least one of the self-sustaining preforms or a...
Patent
1993-06-09
1995-08-08
Powell, William
Etching a substrate: processes
Adhesive or autogenous bonding of two or more...
Removing at least one of the self-sustaining preforms or a...
216 99, 216 48, 3461401, B44C 122, C23F 102
Patent
active
054395542
ABSTRACT:
There is disclosed a method for fabricating a liquid jet recording head having heat acting portions, communicating to orifices for liquid discharge, for applying heat energy to a liquid to form a bubble therein, electricity-heat converters for generating said heat energy, pairs of electrodes, and an upper protective layer, characterized in that the wet etching rate of electrode layer is higher on the upper portion in a direction of film thickness than on the lower portion.
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Murakami Keiichi
Tamura Hideo
Canon Kabushiki Kaisha
Powell William
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