Liquid jet head

Details Liquid jet head Liquid jet head

1995-08-24

1998-02-17

Hecker, Stuart N.

Incremental printing of symbolic information

Ink jet

Ejector mechanism

216 27, B41J 2045

Patent

active

057196079

ABSTRACT:
A highly reliable liquid jet head having excellent properties, comprising a silicon substrate, a tantalum layer having a thickness of 1,100 angstroms or more formed on the substrate, and a piezoelectric device provided on the tantalum layer, containing a layer of titanium oxide or of an oxide of titanium alloy between the tantalum layer and the electrode, or between the electrode and the piezoelectric film is obtained without suffering the formation of cavities in the silicon dioxide layer or the exfoliation between the electrode an a layer adjacent thereto.

REFERENCES:
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patent: 5198834 (1993-03-01), Childers et al.
patent: 5325012 (1994-06-01), Sato
patent: 5491505 (1996-02-01), Suzuki et al.
patent: 5530465 (1996-06-01), Hasegawa et al.
patent: 5580468 (1996-12-01), Fujikawa et al.
patent: 5637126 (1997-06-01), Ema et al.
K. Sameshima et al. "Preparation of PG . . . " Jpn. J. Appl. Phys. vol. 32 (1993) pp. 4144-4146.

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