Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-01-11
2011-01-11
Amari, Alessandro (Department: 2872)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07868996
ABSTRACT:
To provide a liquid immersion microscope device enabling nondestructive liquid immersion observation of a substrate without deteriorating quality of the substrate. To attain this, a liquid immersion microscope device of the present invention includes a supporting unit supporting a substrate as an observation target, an objective lens of a liquid immersion type, a first supplying unit supplying ultrapure water as a liquid for observation to a gap between a tip of the objective lens and the substrate, a first draining unit draining the liquid for observation after observation of the substrate, a second supplying unit supplying a liquid for cleaning, which is different from the liquid for observation drained by the first draining unit, to an area, of the substrate, that has been in contact with the liquid for observation, and a second draining unit draining the liquid for cleaning after the substrate is cleaned.
REFERENCES:
patent: 2005/0052642 (2005-03-01), Shibata et al.
patent: 2005/0179997 (2005-08-01), Komatsu et al.
patent: 2005/0225738 (2005-10-01), Shirai
patent: 2006/0077367 (2006-04-01), Kobayashi et al.
patent: 2006/0164616 (2006-07-01), Okada
patent: 2007/0222958 (2007-09-01), Nishii
patent: 2007/0242242 (2007-10-01), Nagasaka et al.
patent: 1 571 697 (2005-09-01), None
patent: A-2005-083800 (2005-03-01), None
patent: A-2005-234457 (2005-09-01), None
patent: A-2005-234458 (2005-09-01), None
patent: WO 2004/053959 (2004-06-01), None
patent: WO 2004/105107 (2004-12-01), None
patent: WO 2005/031823 (2005-04-01), None
European Search Report for European Application No. 06821944.3; mailed Sep. 27, 2010.
Komatsu Manabu
Shibata Hiromasa
Uchikawa Toshio
Amari Alessandro
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
Liquid immersion microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Liquid immersion microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Liquid immersion microscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2619197