Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-08-14
2007-08-14
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
11403196
ABSTRACT:
A liquid immersion lithography system includes projection optics and a showerhead. The projection optics are configured to expose a substrate with a patterned beam. The showerhead includes a first nozzle and a second nozzle that are configured to be at different distances from a surface of the substrate during an exposure operation.
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Kate Nicolaas Ten
Khmelichek Aleksandr
Loopstra Erik Roelof
Markoya Louis J.
Sewell Harry
ASML Holding N.V.
ASML Netherlands B.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox PLLC
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