Coating apparatus – Immersion or work-confined pool type – With means for moving work through – into or out of pool
Patent
1980-07-18
1981-09-01
Kendall, Ralph S.
Coating apparatus
Immersion or work-confined pool type
With means for moving work through, into or out of pool
118500, 134137, B05C 302
Patent
active
042865425
ABSTRACT:
Apparatus is disclosed for immersing minute integrated circuit chips in an etching solution in manufacturing integrated circuits during research and development. The apparatus includes holder member C having a handle 24 and basket support 26 for carrying a removable unitary basket A and lid structure B wherein fluid flow-through passages 20 are formed and wherein graduated openings 28 in the handle provide for adjustably supporting the basket in a beaker at a desired level.
REFERENCES:
patent: 1883669 (1932-10-01), Ford
patent: 2837055 (1958-06-01), Whitehead
patent: 3168100 (1965-02-01), Rich
patent: 3479196 (1969-11-01), Heimann
Belcher, Jr. Jewell G.
Hollis, Jr. Ben R.
Beumer J. H.
Kendall Ralph S.
Manning J. R.
The United States of America as represented by the Administrator
Wofford, Jr. L. D.
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