Liquid film forming method and solid film forming method

Details Liquid film forming method and solid film forming method Liquid film forming method and solid film forming method

2008-05-13

2008-05-13

Meeks, Timothy (Department: 1762)

Coating processes

Spraying

Moving the base

C427S240000, C118S321000

Reexamination Certificate

active

10202657

ABSTRACT:
A method of forming a liquid film characterized by dropping a liquid on a substrate from a dropping unit while rotating the substrate, moving the dropping unit in the radial direction from the inner periphery of the substrate to the outer periphery of the substrate so that the move pitch of the dropping unit in the radial direction occurring in every revolution of the substrate may change slightly, and forming a liquid film on the substrate by adjusting the feed speed of the liquid to the substrate from the dropping unit, while lowering the rotational frequency of the substrate gradually, so that the liquid on the substrate may not move due to centrifugal force by rotation of the substrate, along with the move of the dropping unit in the radial direction of the substrate.

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