Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-06-28
2011-06-28
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07969549
ABSTRACT:
A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
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Boom Herman
Kruizinga Borgert
Leenders Martinus Hendrikus Antonius
Mulkens Johannes Catharinus Hubertus
Pollard Peter Julian
Asfaw Mesfin T
ASML Netherlands B.V.
Glick Edward J
Pillsbury Winthrop Shaw & Pittman LLP
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