Liquid ejection head and its method of manufacture

Details Liquid ejection head and its method of manufacture Liquid ejection head and its method of manufacture

2007-09-04

2011-10-04

Ahmed, Shamim (Department: 1713)

Etching a substrate: processes

Forming or treating thermal ink jet article

C216S037000, C029S890100, C029S831000, C029S832000, C417S100000, C347S093000, C347S094000, C347S095000

Reexamination Certificate

active

08029685

ABSTRACT:
A method of manufacturing a liquid ejection head and a liquid ejection head capable of preventing corrosion of electrodes are provided. The method of manufacturing a liquid ejection head includes: a step of forming porous silicon areas in portions of a silicon substrate where the liquid paths are to be formed; a step of forming in layers in the porous silicon areas a protective layer, a heating resistor layer, an electrode layer and a heat accumulation layer; a step of forming ink ejection openings in the silicon substrate; and a step of removing the porous silicon areas.

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