Liquid delivering apparatus and method of producing the same

Details Liquid delivering apparatus and method of producing the same Liquid delivering apparatus and method of producing the same

2007-06-12

2007-06-12

Do, An H. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C029S025350

Reexamination Certificate

active

10876529

ABSTRACT:
A method of producing at least one liquid delivering apparatus which delivers a liquid from at least one liquid chamber thereof to a location outside the at least one liquid delivering apparatus, by deforming a piezoelectric element thereof provided at a location opposed to the at least one liquid chamber and thereby applying a pressure to the liquid in the at least one liquid chamber. The method includes the steps of stacking a first sheet member having at least one opening defining the at least one liquid chamber and a second sheet member covering the at least one opening, on each other, so as to provide an integral, stacked body; forming, of a material of the piezoelectric element, a layer on at least a portion of the second sheet member of the stacked body that is opposed to the at least one opening of the first sheet member of the stacked body; and annealing the layer formed on the stacked body, and thereby crystallizing the material of the layer, so as to change the layer into the piezoelectric element.

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