Liquid crystal substrate inspection apparatus

Details Liquid crystal substrate inspection apparatus Liquid crystal substrate inspection apparatus

2007-07-17

2007-07-17

Hollington, Jermele (Department: 2829)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

Reexamination Certificate

active

11053936

ABSTRACT:
A liquid crystal substrate inspection apparatus includes an inspection device for inspecting a liquid crystal substrate and a prober replacing device disposed adjacent to the inspection device. The prober replacing device has a conveying device for conveying a prober for inspecting a liquid crystal substrate. The inspection device and the prober replacing device are arranged next to each other, so that it is possible to shorten an inspection time of the liquid crystal substrate. The prober replacing device has the conveying device for automatically conveying the prober to the inspection device.

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