Liquid crystal on silicon micro-display using carbon nanotube

Details Liquid crystal on silicon micro-display using carbon nanotube Liquid crystal on silicon micro-display using carbon nanotube

2009-01-19

2010-06-01

Qi, Mike (Department: 2871)

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

C349S153000, C349S156000

Reexamination Certificate

active

07728947

ABSTRACT:
A nano-liquid crystal on silicon (nano-LCoS) chip having carbon nanotube (CNT) pillars that are grown on a glass substrate thereof. As the heights of the CNT pillars are uniform, the CNT pillars can function as spacers providing a uniform cell gap between the glass substrate and a silicon chip of the nano-LCoS chip. Also, being excellent electrical conductors, CNT pillars can form a part of the electrical connection between an outside voltage source and the indium tin oxide (ITO) layer formed on the glass substrate. The nano-LCoS chip includes nano-LCoS alignment keys that are formed in the silicon chip and connected to the CNT pillars. By applying the same voltage to the ITO layer and keys, a portion of the liquid crystal activated by the keys become transparent fiduciary marks for optical alignment of nano-LCoS chips.

REFERENCES:
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6122033 (2000-09-01), Mathew et al.
patent: 6791278 (2004-09-01), Russ et al.
patent: 7486287 (2009-02-01), Kim et al.

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