Liquid crystal displaying apparatus and method of manufacturing

Details Liquid crystal displaying apparatus and method of manufacturing Liquid crystal displaying apparatus and method of manufacturing

1997-06-20

1999-12-07

Kim, Robert H.

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

438745, G02F 1136

Patent

active

059992352

ABSTRACT:
A method of manufacturing TFT array substrate comprises forming a control electrode and a control electrode line on a transparent insulating substrate, forming an insulating film on the control electrode and the control electrode line, forming a semiconductor layer through the insulating film on the control electrode and the control electrode line, forming a transparent conductive film on the insulating film, forming a picture element electrode by etching the transparent conductive film with an etchant including concentrated hydrochloric acid mixed with concentrated sulfuric acid and having water as main component, and forming a pair of electrodes on the semiconductor layer.

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