Liquid crystal display having an active matrix substrate with th

Details Liquid crystal display having an active matrix substrate with th Liquid crystal display having an active matrix substrate with th

1999-02-11

2000-07-04

Sikes, William L.

Liquid crystal cells, elements and systems

Nominal manufacturing methods or post manufacturing...

349 42, 349 43, G02F 113, G02F 1136

Patent

active

060846534

ABSTRACT:
In the fabrication of an active matrix substrate, when forming a contact hole in an inter-layer insulating film made of a thermosetting resin and hardening the inter-layer insulating film by heat, the temperature gradient in raising the temperature from room temperature to a baking temperature is arranged to be larger than 10.degree. C./minute. As a result, the tilt angle of the slant face of the contact hole is controlled to be within a range of 45.degree. to 60.degree..

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Theory of Elasticity, Third Edition, S.P. Timoshenko et al, Chapter 13, "Thermal Stress", pp. 431-447 (May 1979).

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