Liquid crystal display having an active matrix substrate with th

Details Liquid crystal display having an active matrix substrate with th Liquid crystal display having an active matrix substrate with th

1997-03-20

1999-05-25

Sikes, William L.

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

349 43, 349138, G02F 1136, G02F 11333

Patent

active

059073764

ABSTRACT:
In the fabrication of an active matrix substrate, when forming a contact hole in an inter-layer insulating film made of a thermosetting resin and hardening the inter-layer insulating film by heat, the temperature gradient in raising the temperature from room temperature to a baking temperature is arranged to be larger than 10.degree. C./minute. As a result, the tilt angle of the slant face of the contact hole is controlled to be within a range of 45.degree. to 60.degree..

REFERENCES:
patent: 5055899 (1991-10-01), Wakai et al.
patent: 5434441 (1995-07-01), Inoue et al.
patent: 5463481 (1995-10-01), Yamamura
patent: 5621556 (1997-04-01), Fulks et al.
patent: 5641974 (1997-06-01), den Boer et al.
patent: 5682211 (1997-10-01), Yao et al.

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