Liquid crystal display device with TFT's each including a Ta gat

Details Liquid crystal display device with TFT's each including a Ta gat Liquid crystal display device with TFT's each including a Ta gat

1991-07-05

1993-01-05

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Amorphous semiconductor material

252 72, 252761, H01L 2701, H01L 2978, H01L 2712

Patent

active

051775778

ABSTRACT:
An active matrix liquid crystal display device with a plurality of thin-film transistors each including a gate electrode of an upper aluminum film and a lower tantalum film formed over a glass substrate and a gate insulator of an upper silicon nitride film and a lower anodized oxide film of the aluminum film.

REFERENCES:
patent: 4469568 (1984-09-01), Kato etal.
patent: 5032536 (1991-07-01), Oritsuki et al.
patent: 5036370 (1991-07-01), Miyago et al.

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