Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Patent
1997-05-09
1999-03-02
Ngo, Ngan V.
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
257 59, 257350, 257351, H01L 2904, H01L 31036
Patent
active
058775145
ABSTRACT:
Provided is a method for fabricating a liquid crystal display device integrated with a driver circuit on a substrate, a surface of the substrate being divided into a P-channel region, an N-channel region, and a pixel region. The method includes the steps of forming a gate electrode on each of the P-channel, N-channel, and pixel regions of the substrate; forming a gate insulating layer on the entire surface of the substrate including the gate electrodes; forming a first transparent electrode layer over the gate insulating layer; forming a conductive layer over the first transparent electrode layer; forming a second transparent electrode layer over the conductive layer; removing portions of the first transparent electrode layer, the conductive layer, and the second transparent electrode layer to form source/drain electrodes adjacent the gate electrodes in each of the P-channel, N-channel, and pixel regions of the substrate; doping first impurities into the second transparent electrode layer in the P-channel region; doping second impurities into the second transparent electrode layer in the N-channel region and in the pixel region; forming a semiconductor layer over the entire surface of the substrate; annealing the semiconductor layer; forming a passivation layer over the entire surface of the substrate; and removing portions of the passivation layer, the second transparent electrode, and the conductive layer in the pixel region to expose a portion of the first transparent electrode layer.
REFERENCES:
patent: 5572046 (1996-11-01), Takemura
patent: 5712495 (1998-01-01), Suzawa
LG Electronics Inc.
Ngo Ngan V.
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