Liquid crystal display device and method of manufacturing the sa

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350333, 357 237, 357 30, G02F 113

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active

049482319

ABSTRACT:
A liquid crystal display device comprises a plurality of display electrodes which are selectively energized through on-off control of thin film transistors. In order to reduce the channel length of the thin film transistors to increase operation speed and obtain uniform characteristics, each display electrode and an associated transistor source electrode is formed on one of a pair of transparent substrates of the liquid crystal display device, a semiconductor layer is formed between the display layer and source electrode, a gate insulating film is formed on the semiconductor electrode, and a gate electrode is formed on a portion of the gate insulating film between the display electrode and source electrode. Then, ions are implanted into the semiconductor layer with the gate electrode used as a mask, thus rendering portions of the semiconductor layer contiguous to the display electrode and source electrode into ohmic layers. A channel is thus obtained between the ohmic layers with its length determined by the length of the gate electrode.

REFERENCES:
patent: 3405331 (1968-10-01), Skalski et al.
patent: 3660732 (1972-05-01), Allison
patent: 4006968 (1977-02-01), Ernstoff et al.
patent: 4169746 (1979-10-01), Ipri et al.
patent: 4644338 (1987-02-01), Aoki et al.
patent: 4653862 (1987-03-01), Morozumi
Richard S. Muller & Theodore I. Kamins, Device Electronics For Integrated Circuits, John Wiley & Sons, Inc., pp. 42-52.
IC Update "Process for P-Channel SOS/MOS" Electronic Products Magazine, Jan. 15, 1973.

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