Liquid crystal display cell with electrodes of substantially amo

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element

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174257, 20419229, 4271263, G02F 1133, H01B 100, C23C 1400, B05D 512

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active

051052911

ABSTRACT:
A liquid crystal display cell comprising a pair of flexible polymer film substrates having a transparent electrode disposed on the surface thereof and a liquid crystal material sandwiched therebetween. The transparent electrode is a metal oxide film which has a surface resistivity of not greater than 100 ohm per square, a bending property of not greater than 2.0, a curling degree, H, of 0<H<5 mm and a transmittance to light of 550 nm of not less than 75%. Further, this metal oxide is substantially amorphous, and is formed by a DC sputtering method.

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patent: 5013416 (1991-05-01), Murayama et al.
Vossen, J. L., "Control of Film Properties by rf-Sputter Techniques", Journal of Vacuum Science and Technology, vol. 8, No. 5, pp. 512-529, 1971.
Fraser et al., "High Conductivity, Transparent Films of Sputtered In.sub.2-x Sn.sub.x O.sub.3-y ", J. Electrochemical Soc.: Solid-State Science and Technology, vol. 119, No. 10, pp. 1368-1374, 10/1972.
Smith et al., "Effects of Heat-Treatment on Indium-Tin Oxide Films", J. Electrochemical Soc: Solid-State Science and Technology, vol. 128, No. 11, pp. 2388-2394, 11/81.
Ridge et al., "Composition Control in Conducting Oxide Thin Films", Thin Solid Films, 96, pp. 121-127, 10/82.

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