Liquid crystal device, liquid crystal display panel and...

Details Liquid crystal device, liquid crystal display panel and... Liquid crystal device, liquid crystal display panel and...

2006-06-13

2006-06-13

Vu, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Field effect device in non-single crystal, or...

C438S155000

Reexamination Certificate

active

07061018

ABSTRACT:
A method of manufacturing a liquid crystal panel comprises the steps of forming a gate insulating film, a channel layer and an etching stopper layer on a transparent substrate bearing a gate electrode, exposing the substrate to light from its back surface side by using the gate electrode as a light shielding mask by photolithography, developing the resist, etching the etching stopper layer, forming a source/drain layer, and etching the source/drain layer and a remaining part of the etching stopper by chemical gas phase etching.

REFERENCES:
patent: 5478766 (1995-12-01), Park et al.
patent: 5610082 (1997-03-01), Oh
patent: 5686980 (1997-11-01), Hirayama et al.
patent: 5814836 (1998-09-01), Hyun
patent: 5844647 (1998-12-01), Maruno et al.
patent: 5917564 (1999-06-01), Kim et al.
patent: 6104042 (2000-08-01), Sah
patent: 6218219 (2001-04-01), Yamazaki et al.
patent: 6229156 (2001-05-01), Murai et al.

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