Liquid crystal device and display apparatus with multilayer elec

Details Liquid crystal device and display apparatus with multilayer elec Liquid crystal device and display apparatus with multilayer elec

1995-02-09

1996-08-06

Gross, Anita Pellman

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

359 54, G02F 11343, G02F 113

Patent

active

055439462

ABSTRACT:
A liquid crystal device is formed by disposing a liquid crystal between a pair of oppositely disposed electrodes, at least one of which has a laminated structure including a first layer of ITO (indium tin oxide), a second layer of Mo (molybdenum) or its alloy, and a third layer of Al (aluminum) or its alloy, disposed in the order named. Because of the Mo-based second layer, the ITO layer is protected during development of a photoresist layer formed on the Al-based third layer even if some pinholes are present in the Al-based third layer. The Mo-based second layer can be etched by an etchant for the Al-based third layer so that the entire process is not complicated because of the provision of the Mo-based second layer.

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