Liquid crystal alignment using electron beam exposure

Details Liquid crystal alignment using electron beam exposure Liquid crystal alignment using electron beam exposure

2006-09-12

2006-09-12

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492100

Reexamination Certificate

active

07105845

ABSTRACT:
An apparatus (10, 10″) for producing an alignment surface on an associated substrate (12, 12″) of a liquid crystal display. An electron source (40) produces a collimated electron beam (50). A substrate support (20, 20″) supports the associated substrate (12, 12″) with a surface normal (80) of the substrate arranged at a preselected angle (α) relative to the collimated electron beam (50). The collimated electron beam (50) is rastered across the associated substrate (12, 12″) at the preselected angle (α) while the substrate moves through the electron beam.

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