Liquid composition for forming a coating film of organopolysilox

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – At least one aryl ring which is part of a fused or bridged...

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524770, 524773, 524858, 528 10, 528 12, 528 14, 528 20, 528 35, 556459, 556462, 556463, C08K 505

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046940405

ABSTRACT:
The invention provides a novel means for providing a highly heat-resistant and corrosion-resistant coating film on the surface of a substrate such as a semiconductor silicon wafer or glass plate by coating the surface with a liquid coating composition which is a solution of an oligomeric organopolysiloxane as a partial dehydration-condensation product of a monohydrocarbylsilane triol RSi(OH).sub.3, optionally, with admixture of a dihydrocarbylsilane diol R.sub.2 Si(OH).sub.2, R being a monovalent hydrocarbon group, e.g. methyl or phenyl, in an organic solvent followed by baking of the coated substrate to convert the coating layer into a cured resin film.

REFERENCES:
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patent: 3786015 (1974-01-01), Merrill
patent: 4158714 (1979-01-01), Brichta et al.
patent: 4226793 (1980-10-01), Kotzsch et al.
patent: 4399266 (1983-08-01), Matsumura et al.
patent: 4499224 (1985-02-01), Anthony et al.

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