Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to attribute – absence or presence of work
Reexamination Certificate
2007-07-03
2007-07-03
Tadesse, Yewebdar (Department: 1734)
Coating apparatus
Control means responsive to a randomly occurring sensed...
Responsive to attribute, absence or presence of work
C118S712000, C118S052000, C118S326000, C118S300000
Reexamination Certificate
active
10628598
ABSTRACT:
A liquid coating device and method for coating a coatable composition on a workpiece to form a coating, wherein a parameter indicative of barometric pressure is measured and at least one thickness-affecting process parameter is adjusted in order to compensate for the effects of variations in barometric pressure on coating thickness uniformity.
REFERENCES:
patent: 4932353 (1990-06-01), Kawata et al.
patent: 5127362 (1992-07-01), Iwatsu et al.
patent: 5211753 (1993-05-01), Swain
patent: 5366757 (1994-11-01), Lin
patent: 5416047 (1995-05-01), Konishi et al.
patent: 5626679 (1997-05-01), Shimizu et al.
patent: 5685908 (1997-11-01), Brytsche et al.
patent: 5766671 (1998-06-01), Matsui
patent: 5777300 (1998-07-01), Homma et al.
patent: 5985357 (1999-11-01), Sanada
patent: 6177133 (2001-01-01), Gurer et al.
patent: 6254936 (2001-07-01), Gurer et al.
patent: 6599560 (2003-07-01), Daggett et al.
patent: 3-178123 (1991-08-01), None
patent: 4-94525 (1992-03-01), None
patent: 05-144721 (1993-06-01), None
Uchiyama, Photoresist Application Device, JP 5-144721 (English Translation), Jun. 1993, pp. 1-10.
Gürer, et al. “Model-based adaptive process control: A CD-control example,” Solid State Technology, pp. 205-206, 208, 210, 212 (Jul. 1996).
Gürer, et al., “. . . Adaptive Process Control in Lithography,” Semicon Korea 98, Semicon Korea Technical Symposium 98, Process & Evaluation Technology, I, II, pp. 205-218.
Cayton Joseph W.
Daggett Joseph W.
Kemp Kevin G.
Williams Daniel J.
FSI International Inc.
Kagan Binder PLLC
Tadesse Yewebdar
LandOfFree
Liquid coating device with barometric pressure compensation does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Liquid coating device with barometric pressure compensation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Liquid coating device with barometric pressure compensation will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3781574