Liquid chemical supply system and liquid chemical supply...

Details Liquid chemical supply system and liquid chemical supply... Liquid chemical supply system and liquid chemical supply...

2007-11-14

2011-10-11

Freay, Charles (Department: 3746)

Pumps

Expansible chamber type

Bellows-type chamber

C417S417000, C417S046000

Reexamination Certificate

active

08033801

ABSTRACT:
The occurrence of fluctuations in liquid chemical during the discharge and intake thereof in a device that employs a liquid chemical supply pump10that discharges liquid chemical taken in by means of a change in volume inside a pump chamber16that accompanies the displacement of a bellows type partition14. The amount of fluctuation in the bellows type partition member14that accompanies the operation of a discharge side valve32will be detected by a displacement sensor58. The amount of fluctuation is a parameter that indicates a correlation with the abrupt flow of liquid chemical that accompanies the opening of the discharge side valve32. Thus, the amount of fluctuation will be reduced, and the pressure inside a pump chamber16prior to the opening of the discharge side valve32will be controlled.

REFERENCES:
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patent: 7241115 (2007-07-01), Luongo et al.
patent: 2007/0267065 (2007-11-01), Okumura et al.
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patent: WO 2006016486 (2006-02-01), None
Office Action issued in JP Application No. 2006-316937 on Jul. 12, 201 1 (with English translation).

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