Fluid handling – Systems – With pump
Patent
1985-11-19
1987-03-03
Chambers, A. Michael
Fluid handling
Systems
With pump
137266, 137589, 118 52, 222 58, 427240, E03B 1100
Patent
active
046467840
ABSTRACT:
Apparatus for dispensing liquid chemicals such as photoresist from containers, in particular, from collapsible pouch-type containers.
REFERENCES:
patent: 2440262 (1948-04-01), Grey et al.
patent: 3131270 (1964-05-01), Ludwig et al.
patent: 4142545 (1979-03-01), Billigmeier
patent: 4188967 (1980-02-01), Joyce
patent: 4197000 (1980-04-01), Blackwood
patent: 4325320 (1982-04-01), Kirisawa
Chambers A. Michael
Lieberstein Eugene
Union Carbide Corporation
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