Linewidth measurement method and apparatus

Details Linewidth measurement method and apparatus Linewidth measurement method and apparatus

1976-09-27

1977-09-27

Sacher, Paul A.

Optics: measuring and testing

Angle measuring or angular axial alignment

With photodetection remote from measured angle

356157, 356204, G01B 1102, G01B 1128, G01N 2122

Patent

active

040508218

ABSTRACT:
Very rapid and accurate linewidth measurements in selected subregions of an LSI mask or wafer are made by means of a low-cost apparatus. The apparatus embodies the recognition that an accurate linewidth determination can be made for any particular feature among a variety of features in a repeated array by a calibrated and normalized measurement of the average light transmission or reflection of a subregion that includes the feature. In turn, the measurement is automatically converted to a linewidth reading by analog computing circuitry.

REFERENCES:
patent: 2939361 (1960-06-01), Hock
patent: 3645811 (1972-02-01), Davis et al.
patent: 3669771 (1972-06-01), Lerner et al.
patent: 3740152 (1973-06-01), Iisuka
Bojman, W., "Detection and/or Measurement on Complex Patterns", IBM Tech. Disc. Bull., vol. 13, 11-1970, pp. 1429-1430.

Affiliated with

Also associated with

Rating

Linewidth measurement method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Linewidth measurement method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Linewidth measurement method and apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1812057