Linearly fine-adjustable stage

Details Linearly fine-adjustable stage Linearly fine-adjustable stage

1993-09-17

1995-08-01

Ben, Loha

Optical: systems and elements

Compound lens system

Microscope

359224, 359391, 359392, G02B 2126, G02B 2608

Patent

active

054384516

ABSTRACT:
The stage plate of a sample carrying stage for optical instruments has a piezoelectric translator that drives the stage plate centrally and directly, and a linear guide comprising at least two elastic elements to guide the stage plate. The elastic elements are arranged coaxially to the piezoelectric translator, which extends through a central recess in the elastic elements.

REFERENCES:
patent: 2803130 (1957-08-01), Bernhardt
patent: 4615591 (1986-10-01), Smith et al.
patent: 4785177 (1988-11-01), Besocke
patent: 4968914 (1990-11-01), West et al.
patent: 5162951 (1992-11-01), Sorce
patent: 5165297 (1992-11-01), Krueger
patent: 5212580 (1993-05-01), Coad et al.
patent: 5286977 (1994-02-01), Yokoyama et al.

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