Linearly extended device for large-surface microwave...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means

Reexamination Certificate

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C118S7230MW

Reexamination Certificate

active

06863773

ABSTRACT:
The aim of the invention is to provide an alternative to the intensive treatment of a product, especially plasma treatment, in specific areas only. Towards this end, the invention provides a device for producing microwaves for treating workpieces, comprising at least one microwave antenna with an extended conductor for producing alternating electromagnetic fields, a housing that substantially extends over the length of the conductor, and an extended microwave decoupling area which follows the conductor and which is located in the housing. The housing is formed by at least one resonant cavity, which has a long shape and follows the course of the microwave antenna. The resonant cavity has at least one tapering, closed, first crown area and the decoupling area essentially extends in the focussing area of the resonant cavity. An at least non-divergent housing area adjoins the resonant cavity.

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patent: 5954882 (1999-09-01), Wild et al.
patent: 6109208 (2000-08-01), Tsuchihashi et al.
patent: 37 12 971 (1988-11-01), None
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patent: 40 37 091 (1992-05-01), None
patent: 43 10 241 (1993-10-01), None
patent: 195 07 077 (1996-04-01), None
patent: 195 03 205 (1996-07-01), None
patent: 19503205 (1996-07-01), None

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